Accurion supplies advanced instrumentation for challenging measurement tasks with its two divisions thin film characterization and active vibration isolation.

Imaging Ellipsometry, a combination of ellipsometry and microscopy, enables the measurement of refractive indices and thicknesses of structures sized down to 1µm.

Active vibration isolation is the most effective solution to isolate sensitive equipment from disturbing vibrations and absolute key to precise and repeatable results. The working principle is based on the active compensation of vibrations. These are detected by extremely sensitive piezo-electric acceleration sensors. A fast and reliable analogue signal processor generates corrective counter forces by electro-magnetic actuators in all six degrees of freedom. Application examples can be found within hardness testing, scanning probe microscopy, scanning electron microscopy, micromanipulation, nanoindentation and profilometry.

34 employees help to develop, manufacture and distribute these products. Branch offices in the US, India and China and over 20 resellers worldwide provide a global sales and service structure.


Active Vibration Isolation Systemhalcyonics_i4, 400x500x90 mm3, M6/25Accurion


Further Information

Accurion GmbH

Stresemannstrasse 30

37079 Goettingen, Germany

Phone: +49 551 99960 0

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